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https://www.sap-plasma.com/zh/ SAP Plasma 雪曼電漿科技
SAP Plasma 雪曼電漿科技 241新北市三重區重新路5段609巷4號9F
工業級高流量電漿水平台 以電力取代化學品,重新定義工業用水標準 利用電漿技術活化水分子,產生高氧化性、超純淨且環境友善的功能水,用於提升製程效率、降低化學品使用量,並減少環境衝擊。 電漿水特性 高氧化還原電位(ORP > 900 mV)(可產生 ·OH、O₃、H₂O₂、NOx 等) 強效殺菌與分解能力(抗生素、PFAS 等污染物) 無二次污染,可分解回水與氧氣 常壓操作,高整合性,維護簡單 1. 晶圓清洗(UPW) 電漿水可有效去除晶圓表面的有機物、微粒、金屬離子及天然氧化層,提高良率與產品可靠度。 優勢: 高氧化能力:去除有機物、顆粒與金屬離子 提升良率與品質:降低缺陷、提高穩定性 高設備相容性:可整合現有清洗系統 環保安全:無有害化學品 製程流程:電漿水生成 → 晶圓清洗 → DI 水沖洗 → 乾燥 2. 廢水處理(PFAS / 抗生素) 電漿水可有效分解廢水中的有機污染物、氨、抗生素、PFAS 與重金屬,降低 COD 與毒性,符合排放標準。 處理流程:廢水進水 → 電漿氧化反應 → 處理後出水 功能: 分解有機污染物(降低 COD/BOD) 去除氨(降低氨氮濃度) 去除氟(降低氟濃度) 去除重金屬(降低金屬離子) 減少污染(更環保) 適用廢水類型: 製程廢水(沖洗、蝕刻、CMP) CMP 研磨液廢水 高氨廢水 重金屬廢水 其他工業廢水 符合環保法規,支持綠色製造與永續發展 3. 冷卻水 / HVAC 系統 電漿水可抑制細菌、生物膜與水垢形成,同時分解抗生素與有機污染物,確保系統效率與水質安全。 功能: 殺菌與生物膜控制(去除細菌與黏泥) 分解抗生素與有機物(降低有害物質) 維持水質(減少結垢與腐蝕) 節能環保(提升熱交換效率、降低能耗) 應用場域: 冷卻水塔 冰水機系統 空調箱(AHU) HVAC 循環水系統 製程冷卻系統 核心優勢(Key Benefits) 全球唯一高流量電漿水系統(穩定供應) 可無縫整合現有系統(低改造成本) 化學藥劑使用降低 30–70% 投資回收期 < 2 年(提升效率與良率) 技術定位(市場區隔) 非競爭關係,而是製程升級的關鍵輔助技術雪曼電漿並非直接售賣動輒數億的製程整合機台,而是透過「技術嵌入」與「專案開發」切入一線大廠供應鏈,SAP Plasma Insight。 核心理念 將「水」轉化為製程工具,而非成本負擔⚡ 用電力取代化學品,重新定義工業用水標準 https://www.sap-plasma.com/zh/hot_533586.html 電漿水在半導體的應用 SAP PAW for IC / Industry 2026-05-05 2027-05-05
SAP Plasma 雪曼電漿科技 241新北市三重區重新路5段609巷4號9F https://www.sap-plasma.com/zh/hot_533586.html
SAP Plasma 雪曼電漿科技 241新北市三重區重新路5段609巷4號9F https://www.sap-plasma.com/zh/hot_533586.html
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2026-05-05 http://schema.org/InStock TWD 0 https://www.sap-plasma.com/zh/hot_533586.html

Energy Efficiency of Nitrogen Fixation by

SAP-Dual-Plasma Activated Water System


Abstract

This study evaluates the nitrogen fixation efficiency of a dual atmospheric plasma system producing plasma-activated water (PAW) at an electrical conductivity (EC) of 500 µS/cm. Reverse osmosis (RO) water (initial EC < 100 µS/cm) was treated by plasma discharge for 40.16 minutes to reach EC 500 µS/cm. The electrical power input was 1.1 kW, resulting in a total batch energy consumption of 0.736 kWh.

Immediately after plasma activation, nitrate concentration reached 884 mg/L, corresponding to a nitrogen fixation efficiency of 0.91 kWh/mol-N. After long-term stabilization (1500 h), nitrate concentration stabilized at 323 mg/L, corresponding to an effective energy efficiency of 2.49 kWh/mol-N. The stabilized value represents the practical usable nitrogen fixation efficiency of the system.
Introduction
Plasma-activated water (PAW) has emerged as a sustainable approach for atmospheric nitrogen fixation under ambient conditions. Unlike the Haber–Bosch process, plasma systems operate at room temperature and atmospheric pressure, offering decentralized nitrogen production potential.
This study quantifies the nitrogen production rate and energy efficiency of the Shermann dual-plasma PAW system under EC-controlled operation.
2. Materials and Methods

     2.1 Plasma System Operation

A dual SAP-plasma excitation system was used to treat RO water

Operational parameters:

  • Feed water: Reverse osmosis (RO) water
  • Initial EC: < 100 µS/cm
  • Target EC: 500 µS/cm
  • Plasma excitation time: 40.16 minutes (0.669 h)
  • Electrical power input: 1.1 kW (excluding compressed air energy)
  • Production rate at EC 500: 84.5 L/h

2.2 Energy Consumption

Total electrical energy per batch:

Energy=Power × Time

=1.1kW × 0.669h =0.736kWh

2.3 Production Capacity

Including water filling and discharge time:

Production capacity = 84.5 L/h @EC500

Single batch water volume:=56.5L

 

2.4 Nitrate Analysis

Nitrate concentrations were measured at three EC conditions (300, 500, and 800 µS/cm). Immediate and long-term (up to 1500 h) nitrate stability were recorded.

3. Results

3.1 Immediate Nitrate Concentration

       At EC 500 µS/cm:

NO₃⁻ = 884 mg/L

Total nitrate mass per batch:

884mg/L × 56.5L = 49.9g NO

Conversion to Nitrogen (NO₃⁻-N) mass

 

Moles of nitrogen:

 

Energy Efficiency
    

3.2 Long-Term Stabilized State (1500 hr)

NO₃⁻ = 323 mg/L

Total nitrate mass:
         

Nitrate mass:
   

Moles of nitrogen

Energy efficiency:

  

4. Discussion

Condition

mol N

Energy (kWh)

kWh/mol-N

Immediate (884 ppm)

0.806

0.736

0.91

Stabilized (323 ppm)

0.295

0.736

2.49

The immediate value reflects peak plasma fixation yield, while the stabilized value represents practical nitrogen retention after reactive species equilibration.

Compared to conventional ammonia synthesis (~8–12 kWh/kg NH), the plasma system demonstrates competitive decentralized nitrogen fixation potential under ambient conditions.

 

  1. Conclusion

The SAP-dual-plasma system achieves:

  • Peak nitrogen fixation efficiency: 0.91 kWh/mol-N
  • Stabilized practical efficiency: 2.49 kWh/mol-N
  • Single modular production capacity: 84.5 L/h @ EC 500 µS/cm

The stabilized value should be considered the realistic engineering efficiency for agricultural or industrial deployment.

This modular system can be expanded indefinitely to accommodate large-scale agricultural and industrial applications.

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